000
00317 a2200133 4500
020
_a
0195681444
082
_a
621.3.049.77 CAM
245
_a
The science and engineering of microelectronic fabrication
250
_a
2/e
260
_b
Oxford
_c
2001
300
_a
xix, 603p
942
_c
G
100
_a
campbell, Stephen A
999
_c
2500
_d
2500