000 00317 a2200133 4500
020 _a0195681444
082 _a621.3.049.77 CAM
245 _aThe science and engineering of microelectronic fabrication
250 _a2/e
260 _bOxford
_c2001
300 _axix, 603p
942 _cG
100 _acampbell, Stephen A
999 _c2500
_d2500