000
a
999
_c
3876
_d
3871
020
_a
9789535110859
245
_a
Advances In Micro/Nano electromechanical systems and fabrication technologies
260
_b
Intech
_c
2014
300
_a
226p.
942
_c
BK
100
_a
Takahata K
_9
1539