| 000 | 00590nam a22001457a 4500 | ||
|---|---|---|---|
| 008 | 111011t xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781420055191 | ||
| 100 |
_aMadou Marc J. _cFundamentals of Microfabrication and Nanotechnology Vol. I _9293 |
||
| 245 |
_aFundamentals of Microfabrication and Nanotechnology Vol. I _cMarc J. Madou |
||
| 250 | _a3rd Ed | ||
| 260 |
_bCRC Press _c2012 |
||
| 300 | _axiii, 656p. | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c613 _d613 |
||
| 952 |
_w2011-10-11 _p0001780 _r2011-10-11 _40 _00 _bIIITDM _10 _o621.372:621.382 MAD _d2011-10-11 _8REF _70 _cREF _2udc _g11766.00 _yREF _aIIITDM |
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