| 000 | 00559nam a22001337a 4500 | ||
|---|---|---|---|
| 008 | 111011t xxu||||| |||| 00| 0 eng d | ||
| 100 |
_aMadou Marc J. _cFundamentals of Microfabrication and Nanotechnology Vol. III _9295 |
||
| 245 |
_aFundamentals of Microfabrication and Nanotechnology Vol. III _cMarc J. Madou |
||
| 250 | _a3rd Ed | ||
| 260 |
_bCRC Press _c2012 |
||
| 300 | _ax | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c615 _d615 |
||
| 952 |
_w2011-10-11 _p0001782 _r2012-06-22 _40 _00 _bIIITDM _10 _o621.372:621.382 MAD _d2011-10-11 _8REF _70 _cREF _2udc _yREF _s2012-05-14 _l2 _aIIITDM |
||